Step-templated CVD growth of aligned graphene nanoribbons supported by a single-layer graphene film.

We present chemical vapor deposition (CVD) growth of a hybrid structure of aligned graphene nanoribbons (GNRs) supported by a single-layer graphene sheet. The step structure created on the epitaxial Co film is used to segregate arrays of aligned GNRs. Reflecting the highly ordered step structure of the Co catalyst, straight nanoribbons with high aspect ratio (>100) are formed. Analysis suggests that a large-area, single-layer graphene film also grows over the aligned GNRs, making a GNR-graphene hybrid structure. We also demonstrate the isolation of aligned GNRs by oxygen plasma treatment or partial transfer of the hybrid film. These findings on the formation of highly aligned GNRs give new insights into the formation mechanism of graphene and can be applied for more advanced graphene structure for future electronics.